無塵室的等級規範

無塵室依等級的不同,對一定空間內的微塵粒子最大容許量亦有一定規範,在國際標準中最常用的規範有Fed-Std-209E及ISO-14644。

 

※ 無塵室等級規範

Cleanroom Standard

Cleanroom Classification Guidelines

ISO 14644-1

Class 3

Class 4

Class 5

Class 6

Class 7

Class 8

Federal Standard 209E

1

10

100

1,000

10,000

100,000

Air changes / hour

360-540

300-540

240-480

150-240

60-90

5-48

 

※ 微塵粒子數的潔淨度

ISO Classification Number

Maximum concentration limits (particles/m³ of air) for particles equal to and larger than the considered sizes shown below

 

≥0.1µm

≥0.2µm

≥0.3µm

≥0.5µm

≥1µm

≥5.0µm

ISO Class 1

10

2

-

-

-

-

ISO Class 2

100

24

10

4

-

-

ISO Class 3

1,000

237

102

35

8

-

ISO Class 4

10,000

2,370

1,020

352

83

-

ISO Class 5

100,000

23,700

10,200

3,520

832

29

ISO Class 6

1,000,000

237,000

102,000

35,200

8,320

293

ISO Class 7

-

-

-

352,000

83,200

2,930

ISO Class 8

-

-

-

3,520,000

832,000

29,300

ISO Class 9

-

-

-

35,200,000

8,320,000

293,000

 

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