For the different classification of the cleanroom, the ISO-14644 and Fed-Std-209E definition are the standards which all cleanrooms must conform to.
※ Cleanroom Classification Table
Cleanroom Standard |
Cleanroom Classification Guidelines |
ISO 14644-1 |
Class 3 |
Class 4 |
Class 5 |
Class 6 |
Class 7 |
Class 8 |
Federal Standard 209E |
1 |
10 |
100 |
1,000 |
10,000 |
100,000 |
Air Changes / Hour |
360-540 |
300-540 |
240-480 |
150-240 |
60-90 |
5-48 |
※ Particles
ISO Classification Number |
Maximum concentration limits (particles/m3 of air) for particles equal to and larger than the considered sizes shown below |
|
≥0.1µm |
≥0.2µm |
≥0.3µm |
≥0.5µm |
≥1µm |
≥5.0µm |
ISO Class 1 |
10 |
2 |
- |
- |
- |
- |
ISO Class 2 |
100 |
24 |
10 |
4 |
- |
- |
ISO Class 3 |
1,000 |
237 |
102 |
35 |
8 |
- |
ISO Class 4 |
10,000 |
2,370 |
1,020 |
352 |
83 |
- |
ISO Class 5 |
100,000 |
23,700 |
10,200 |
3,520 |
832 |
29 |
ISO Class 6 |
1,000,000 |
237,000 |
102,000 |
35,200 |
8,320 |
293 |
ISO Class 7 |
- |
- |
- |
352,000 |
83,200 |
2,930 |
ISO Class 8 |
- |
- |
- |
3,520,000 |
832,000 |
29,300 |
ISO Class 9 |
- |
- |
- |
35,200,000 |
8,320,000 |
293,000 |
